International Conference on Electron Microscopy
and XLII Annual Meeting of the Electron Microscope Society of India

May 16-18, 2024 | IIT Bombay, Mumbai, India

Organized by
Indian Institute of Technology Bombay, Mumbai
In association with
West Zone of Electron Microscope Society of India

At Victor Menezes Convention Centre, IIT Bombay, Mumbai

Multimodal Characterization of Energy Materials using
TESCAN Plasma FIB-SEM with integrated ToF-SIMS

Jiri Dluhos

Title: Product Manager, FIB-SEM for Materials Science,

Email: jiri.dluhos@tescan.com

Affiliation: TESCAN Group, a.s

Jiri Dluhos is a Product Manager for FIB-SEM systems at TESCAN GROUP, Brno, Czech Republic. His background in materials science and previous positions in the company - Application Specialist and R&D Specialist for FIB-SEM - have given him a comprehensive overview of electron microscopy, focused ion beam technology, its applications and overall contribution to microanalytical tasks, with a particular focus on 3D multimodal materials characterization using FIB-SEM.


The primary goals of materials research in energy materials are to optimize production processes, enhance the performance of existing technologies, and develop new types of materials. Fulfillment of innovations requirements is based on the effective, comprehensive, structural, and chemical multiscale characterization of materials.

High resolution imaging capability of a Scanning Electron Microscope combined with precise removal of large volumes of material using a plasma Focused Ion Beam (FIB-SEM) and nano analytical techniques like Energy Dispersive X-Ray Spectrometry (EDS) Electron Backscattered Diffraction (EBSD) or Time-of-Flight Secondary Ion Mass Spectrometer (ToF-SIMS) brings new possibilities in correlated 3D microscopy and spectroscopy.

In our contribution, we would like to illustrate the information obtainable by adding ToF-SIMS measurement into the serial-sectioning workflow (3D ToF-SIMS) and in combination with EDS (3D EDS), for characterization of 3D distribution of Li and Li-based molecules in battery research and material development for energy storage.

Application area: Battery research, Energy storage materials, Materials development, Multiscale characterization

Revolutionizing Material Characterization with
High-Speed 4D X-ray Imaging


Title: National manager Product support (EM & X-ray)


Worked extensively in the field of Electron microscopy & X-ray CT system for the last 28 years and provided product & application support for EM (SEM, FESEM, EPMA, TEM, FIB) & X-ray systems including major companies JEOL & Carl Zeiss apart from TESCAN. Trained multiple Times in TESCAN, JEOL & Carl Zeiss.


Traditionally, X-ray CT for 3D imaging took 20-30 mins per dataset for useful data. Today's needs demand 4D-X-ray systems, like TESCAN Micro-CTs, capturing data 200-250 times faster. This enables real-time dynamic studies without sample relaxation, under varying temperature, tensile, compression, fluid Flow, charging & discharging, etc. TESCAN's new technology allows elemental composition analysis alongside X-ray imaging, a boon to material characterization. Artefact-free imaging is achieved via various scanning methods like Heliscan and Cone Scan, all in one instrument. Revolutionizing 4D X-ray, TESCAN ensures speed, precision, and versatility in material characterization.

Application area: Battery, Geology, Food industry, Material science, Dynamic studies, oil&Gas, etc.