Park Systems

Park Systems Corporation is the industry leader in manufacturing nanoscale microscopy and metrology solutions. Its comprehensive range of products includes atomic force microscopy (AFM), white light interferometry, infrared spectroscopy, and ellipsometry systems. The company’s commitment to excellence has resulted in the development of several groundbreaking innovations, including True Non-Contact Imaging, 3D metrology, and fully automated AFM systems that are able to cater to both research and industrial needs. Park Systems products offer extensive application potential within the fields of scientific research, nanoscale engineering, semiconductor fabrication, and quality assurance. The company’s ongoing dedication has earned Park Systems the status of the most preferred choice for nano-metrology products among the leading semiconductor companies, renowned scientific research universities, and national labs.

Key Products and Services:

Material Science & Chemistry

The versatility of Park AFMs allows them to serve as the optimal nanometrology solutions within the materials science and chemistry fields, wherein nanometrology is employed to characterize the properties and behavior of nanoscale materials and molecules. With the capability to characterize materials' electrical, magnetic, mechanical, and morphological properties, Park AFMs offer specialized operating modes that empower materials researchers to advance their understanding and control of nanoscale behavior. They also enable chemistry scientists to scale up their research on the chemical composition, structure, and reactivity of nanoparticles, nanocomposites, and other nanoscale materials

Thin Film Characterization

Parks Imaging Spectroscopic Ellipsometers combine the benefits of spectroscopic ellipsometry and optical microscopy in a single device. The integration of the two technologies creates a unique metrology tool that redefines the limits of both spectroscopic ellipsometry and polarization-contrast microscopy. The enhanced spatial resolution of Parks Imaging Spectroscopic Ellipsometers expands ellipsometry into new areas of microanalysis, microelectronics, and bio analytics.

Semiconductor & Display

With a full line of automated AFMs for semiconductor fabrication metrology, device failure analysis and other industrial applications, Park Systems possesses a portfolio that is ready to meet the needs of the semiconductor and display industry—precise measurement and control of nanoscale structures that are crucial for device fabrication and performance optimization. Park AFM solutions allow engineers to take highly accurate, repeatable and complete measurements, thereby increasing the manufacturing efficiency and resulting quality of production.