The KLA iMicro represents a new standard in flexible, nanoscale mechanical testing. Built on a high-stiffness carbon fiber gantry with integrated vibration isolation, it ensures ultra-stable, noise-free measurements across a diverse range of materials.
At its core, the InForce 1000 electromagnetic actuator enables precise force and displacement control up to 1 N, with capacitance-based sensing and 100 kHz data acquisition for accurate capture of nanoscale material responses. The platform supports interchangeable actuators, extending testing to soft films, hard coatings, and tribological measurements with the Gemini 2D transducer for multi-axis force control.
The iMicro’s modular architecture supports a wide suite of test methods, including Continuous Stiffness Measurement (CSM), AccuFilm™ Thin Film Analysis, NanoBlitz™ 3D/4D Property Mapping, and ProbeDMA™ Local Dynamic Mechanical Analysis. These capabilities enable in-depth analysis of hardness, modulus, creep, and viscoelastic properties across varying depths, frequencies, and spatial dimensions.
Optional features such as active vibration isolation, 300°C sample heating, and linear optical encoders further enhance precision and throughput. The system’s InView software suite—including RunTest, ReviewData, and InFocus—streamlines setup, data visualization, and reporting, enabling fast, reproducible nanomechanical characterization for research and industrial applications alike.
