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Brand: KLA Instruments
Category: Nanomechanical testing
Industry: Academia, Semiconductors, Pharma, Bio-pharma & Vaccine, Cement, Iron & Steel, Paint, Pigments & Polymers
The KLA iNano® Nanomechanical Tester is a compact, automated system for nanoindentation, hardness, scratch, and universal nanoscale testing. Powered by the InForce 50 actuator with up to 50 mN force capability, the iNano delivers precise force and displacement control for thin films, coatings, and soft materials. It features Continuous Stiffness Measurement (CSM), AccuFilm™ thin film analysis, NanoBlitz™ 3D/4D mechanical mapping, and ProbeDMA™ local dynamic mechanical analysis, providing comprehensive mechanical property characterization with ISO 14577 compliance.
The KLA iNano® is engineered for flexible and user-friendly nanomechanical testing of coatings, thin films, and small material volumes. Combining a high-stiffness gantry, integrated vibration isolation, and fast data acquisition electronics, it ensures reliable, repeatable nanoscale measurements across a wide range of materials—from soft polymers to hard ceramics.
Its InForce 50 electromagnetic actuator offers precise displacement control with nanometer-scale resolution and up to 50 mN load capacity, making it ideal for testing thin films, low-modulus materials, and small structures. The InView software suite—featuring RunTest, ReviewData, and InFocus—simplifies test setup, analysis, and reporting for efficient workflows in both research and industry.
The Continuous Stiffness Measurement (CSM) module enables real-time modulus and hardness profiling as a function of depth, while AccuFilm™ corrects for substrate influence in thin film characterization. NanoBlitz™ 3D and 4D mapping rapidly generate quantitative property maps, and ProbeDMA™ extends analysis to viscoelastic and frequency-dependent mechanical behavior of soft materials.
Optional modules such as scratch and wear testing, 300°C sample heating, and active vibration isolation expand the iNano’s versatility for advanced studies in tribology, thin film durability, and temperature-dependent performance.
Compact, stable, and ISO 14577–compliant, the iNano provides a powerful, space-efficient solution for academic, industrial, and quality assurance laboratories seeking quantitative nanomechanical data.
Compact, Modular Design – Space-saving system with upgradeable modules
InForce 50 Actuator – 50 mN electromagnetic transducer with capacitive displacement sensing
Continuous Stiffness Measurement (CSM) – Real-time hardness and modulus profiling
AccuFilm™ Thin Film Method – Substrate-corrected thin film property evaluation
NanoBlitz™ 3D/4D Mapping – Rapid quantitative mapping of modulus and hardness
ProbeDMA™ Local Dynamic Mechanical Analysis – Viscoelastic property testing at nanoscale
Scratch and Wear Testing – Film adhesion and durability characterization
300°C Sample Heating Option – Controlled thermal testing in inert or ambient conditions
Integrated Optical Microscope – Digital zoom for precise site targeting
Active Vibration Isolation – Optional six-degree vibration suppression system
ISO 14577 Compliant – Standardized, traceable nanoindentation measurements
Compact Precision. Comprehensive Capability.
The KLA iNano® Nanomechanical Tester delivers automated, high-accuracy nanoscale mechanical characterization in a compact, easy-to-use platform. Featuring InForce 50 actuation, CSM, AccuFilm™, NanoBlitz™, and ProbeDMA™, it enables quantitative analysis of thin films, polymers, and coatings. Designed for research, industrial testing, and quality control, the iNano offers reliable, ISO-compliant results and upgradeable performance in a small footprint.
| Parameter | Specification / Capability |
|---|---|
| Force Range | 1 µN – 50 mN (InForce 50 actuator) |
| Displacement Resolution | Sub-nanometer |
| Data Acquisition Rate | 100 kHz |
| Control Time Constant | 20 µs |
| Temperature Range | Ambient – 300°C (optional heating) |
| Modules | CSM, AccuFilm™, NanoBlitz™ 3D/4D, ProbeDMA™, Scratch/Wear |
| Software Suite | InView (RunTest, ReviewData, InFocus, Experiment Scripting) |
| Optical Imaging | Integrated microscope with digital zoom |
| Vibration Isolation | Passive (standard) / Active (optional modular rack) |
| Compliance | ISO 14577 |
Thin Film & Coating Testing – Hardness, modulus, and substrate-independent film analysis
Soft Materials & Polymers – Dynamic modulus and viscoelastic property measurement
Composites & Ceramics – Nanoindentation for hardness and stiffness gradients
Semiconductors & MEMS – Structural testing and process validation
Energy Storage & Battery Materials – Thin electrode and coating characterization
Pharmaceuticals & Biomaterials – Mechanical performance and elasticity testing
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