The KLA NanoFlip Nanomechanical Tester defines a new standard for in-situ mechanical testing within SEM and FIB systems, providing precise quantitative nanomechanical data while capturing real-time imaging of material behavior. Its patented flip mechanism allows effortless switching between sample imaging and mechanical testing, enhancing throughput and enabling correlative analysis.
Powered by electromagnetic transducers for artifact-free x–y control, the NanoFlip delivers accurate force and displacement measurements across a wide range of materials, from soft polymers to hard metals and thin films. The system’s InForce 50 actuator provides 50 mN force capability with sub-nanometer displacement resolution, while the optional Gemini 2D transducer introduces multi-axis force control for tribological and lateral force measurements.
Through InView software, users can perform automated tests with live SEM video synchronization, enabling direct correlation between mechanical events and microstructural evolution. The RunTest, ReviewData, and InFocus modules streamline setup, data analysis, and presentation-quality reporting.
The NanoFlip supports advanced modes such as Continuous Stiffness Measurement (CSM), NanoBlitz™ 3D and 4D mechanical mapping, ProbeDMA™ local dynamic mechanical analysis, and True Test I–V for electrical property correlation. The system’s Method Editor allows custom protocol design for universal nanomechanical experiments, including indentation, compression, tensile, and wear tests.
Compatible with optical profilers, Raman spectroscopy, x-ray scattering, and beamline environments, the NanoFlip provides multi-modal, correlative data acquisition under controlled ambient, vacuum, or inert conditions—ideal for battery, MEMS, and semiconductor materials research.
Compliant with ISO 14577 standards, the NanoFlip ensures traceable and reproducible nanomechanical measurements, combining imaging precision with testing flexibility.
