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High-Vacuum Control (10⁻⁵ Torr in <5 Minutes): Provides a clean, stable high-vacuum environment for advanced nanoscale measurements beyond ambient or dry nitrogen (N₂) conditions.
Chamber size: 325 mm × 420 mm × 320 mm. -
Low-Outgassing Chamber Materials: Optimized construction minimizes outgassing, reduces pump-down time, and maintains stable vacuum performance for consistent results.
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Motorized Photodetector (A–B) Alignment: Uses a superluminescent diode (SLD) for low-coherence illumination and enhanced image clarity.
Precise X–Y beam control with PSPD alignment, including A–B axis adjustment under vacuum without opening the chamber. -
Hivac Manager Software: One-click pumping and venting with automated workflow visualization for simplified, efficient vacuum operation.
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Improved Z Scan Straightness: Maintains ≤0.1% straightness with <5 nm out-of-axis motion at full 15 µm extension for distortion-free nanoscale measurements.
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Stable & Drift-Minimized Z Assembly: Compact design with preload spring, kinematic pin, and piezo actuator ensures accurate vertical motion and reliable imaging performance.