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Brand: Park Systems
Category: Microscope - Atomic Force
Industry: Academia, Semiconductors, Material Science & Chemistry
The leading nanometrology tool bridging research and industry
Park NX20 300 mm is an atomic force microscope (AFM) designed for large-sample research and 300 mm wafer failure analysis, making it a key platform for industrial R&D. As Park Systems’ original 300 mm sample AFM, it delivers precise and repeatable nanoscale measurements and is also widely used in academia. Building on these strengths, NX20 300 mm serves as a bridge for facilities transitioning from research-scale AFM to inline production.
At the core of the NX20 300 mm are Park Systems’ proprietary orthogonal scan system and True Non-contact™ mode, innovations that virtually eliminate lateral motion artifacts while protecting both tip and sample. Together, these technologies ensure artifact-free, high-resolution imaging even for the most delicate or challenging samples.
From materials science and semiconductors to polymers and bioengineering, the NX20 300 mm delivers robust performance and dependable results, making it a trusted platform for advanced nanoscale metrology.
| Parameter | Specification |
|---|---|
| Instrument Type | Large-Sample Atomic Force Microscope (AFM) |
| Travel Range (XY) | 300mm × 300mm motorized stage |
| Measurement Modes | Topography, True Non-Contact™, C-AFM, PFM, EFM, MIM, and other AFM modes |
| Noise Level | Ultra-low noise electronics for high-resolution imaging |
| Z Detector | High-sensitivity detector for nanoscale topography |
| Sample Compatibility | 300mm wafers and other large-format substrates |
| Imaging Resolution | Sub-nanometer vertical precision |
| System Type | Automated large-sample AFM for FA, QA, and QC applications |
| Customization | Open-access architecture for system integration and upgrades |
| Application Images | Description | Scanning Conditions |
| Cu Pad Oxidation: Oxidation on a Cu pad was characterized in True Non-contact mode. The scan revealed a peak-to-valley height difference of 120.7 nm, and the image shows localized oxidation features on the pad surface. | - System: NX20 300mm - Scan Mode: True Non-contact - Scan Rate: 1 Hz - Scan Size: 40 µm × 40 µm - Pixel Size: 1024 × 512 pixels - Peak-to-valley: 120.7 nm |
|
| Artificial Spin Ice lattice: An artificial spin ice lattice was measured using Magnetic Force Microscopy (MFM), providing phase information of the magnetic response. The image highlights the characteristic ball-like arrangement of the artificial lattice. | - System: NX20 300mm - Scan Mode: Magnetic Force Microscopy (Channel: MFM Phase) - Scan Rate: 0.5 Hz - Scan Size: 33 µm × 33 µm - Pixel Size: 2048 × 2048 pixels |
|
| PMN-PT: A PMN-PT sample was measured using Piezoresponse Force Microscopy (PFM). The lateral PFM phase image highlights the domain orientation and lateral response of the ferroelectric material. | - System: NX20 300mm - Scan Mode: Piezoresponse Force Microscopy (Channel: Lateral PFM Phase) - Scan Rate: 0.3 Hz - Scan Size: 10 µm × 10 µm - Pixel Size: 256 × 256 pixels |
|
| Polyvinyl Alcohol (PVA) Transfer: The surface of a polyvinyl alcohol (PVA) transfer sample was characterized in Tapping mode. The resulting image highlights significant roughness from the transfer process, with a peak-to-valley height difference of 168.2 nm. | - System: NX20 300mm - Scan Mode: Tapping - Scan Rate: 1 Hz - Scan Size: 10 µm × 10 µm - Pixel Size: 256 × 256 pixels - Peak-to-valley: 168.2 nm |
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