Field-free analytical UHR SEM for materials characterization at the nanoscale.
Key Benefits :
- Uncompromised characterization of all types of materials at the nanoscale
- Ideal for characterization of materials at low beam energies for maximum surface topography
- Excellent imaging of beam-sensitive and non-conductive samples
- Fully automated setup of electron beam ? optimal imaging conditions are guaranteed by the In-Flight Beam TracingTM
- Intuitive live SEM navigation on the sample at magnification as low as 2X without the need of an extra optical navigation camera thanks to the Wide Field OpticsTM design
- Unique In-Beam Multidetector design allowing angle and energy selective BSE detection
- Intuitive software modular platform designed for effortless operation regardless of users' skill level
Achievable Resolution :
- 0.5 nm at 15 keV* (Subject to ideal installation site conditions)
- 0.8 nm at 1 keV* (Subject to ideal installation site conditions)
Probe Current :
- 2 pA–400 nA, continuously adjustable
Stage :
Motorized, 5-axis SW controlled eucentric stage
- X & Y axis travel range: 130 mm
- Z axis travel range: 95 mm
- Tilt range: -60° to +90°
- Rotation: 360 degrees (continuous)