Spectroscopic Reflectometry

Spectroscopic Reflectometry

Spectroscopic reflectometry: RM 1000/2000

The spectroscopic reflectometer RM 1000/2000 features UV to NIR spectral range from 200 nm ? 930 nm. The optical layout is optimized for light throughput for reliable measurements of n and k even on rough or curved surfaces. Precise height and tilt adjustment leads to accurate single beam reflectance measurements, stable day after day.

Film Thickness Probe table top reflectometer FTPadv

The FTPadv is a cost-effective table top solution for spectroscopic reflectometry which features very quick thickness measurements. A measurement is performed in less than 100 ms with a precision of lower than 0.3 nm and film thickness range of 50 nm - 25 ?m. A broad range of predefined recipes is included for easy spectroscopic reflectometry operation.

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